Electron Beam-Induced Sample Contamination in the SEM

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TEM sample preparation of a SEM cross section using electron beam induced deposition of carbon

Article history: Received 25 May 2015 Received in revised form 3 July 2015 Accepted 6 July 2015 Available online xxxx

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ژورنال

عنوان ژورنال: Microscopy and Microanalysis

سال: 2005

ISSN: 1431-9276,1435-8115

DOI: 10.1017/s1431927605507785